Self-aligned contacts

S.7.2 Resolution Limits and Self-Aligned Contacts by Hybrid VTE-OVPD... 

To achieve the lowest possible delay a bipolar switching transistor developed by IBM minimizes parasitic resistances and capacitances. It consists of self-aligned emitter and base contacts, a thin intrinsic base with an optimized collector doping profile, and deep-trench isolation (36). Devices must be isolated from each other to prevent unwanted interactions in integrated circuits. While p—n junctions can be used for isolation, IBM s approach etches deep trenches in the siUcon wafer which are filled with Si02 to provide electrical insulation. 

Figure 19.4 Rear view of a bulk oil circuit breaker assembly showing single-break contacts, self aligning cluster Isolating contacts, terminal bushing and arc control pots (Courtesy ...

Deep groove Angular contact ball bearing Four-point Self-aligning... 

Spherical bearings are usually furnished in a doublerow mounting that is inherently self-aligning. Both rows of rollers have a common spherical outer raceway. The rollers are barrel-shaped with one end smaller to provide a small thrust to keep the rollers in contact with the center guide flange. 

There exist applications where the traditional hard mask can be left in place without any adverse effect on the performance of the device. For instance, in DRAM devices, SiON can be left on the gate layer, where it can serve as part of the self-aligning sequence of the storage cell and bit line contacts. It must be... 

A perfect line contact is difficult to realize, but it should be pursued. Therefore a self-aligning elastic hinge support was designed, which is located between follower body and plate, see Fig.20. All results from the next section are obtained using this device. 

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