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Secondaiy ion mass spectroscopy

Secondaiy-ion mass spectroscopy (SIMS) is based on the mass spectrometric detection of the secondary ions emitted upon bombardment of the sample with a primary ion beam. The composition... [Pg.22]

Secondaiy ion mass spectroscopy is based on surface bombardment by argon ions in UHV, followed by mass spectrometiy of the charged species which are sputtered from the sample s surface. It provides specific information on surface species, high spatial resolution, and depth profiling. ... [Pg.83]

See other pages where Secondaiy ion mass spectroscopy is mentioned: [Pg.774]    [Pg.9]   
See also in sourсe #XX -- [ Pg.80 ]



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