Roughness of tungsten films

In both cases smoother films are desirable although this is not to say that the patterning of rough films is impossible. As examples, many of the studies mentioned in paragraph 5.3.2 probably use low pressure processes which yield rougher films. 

The roughness of the tungsten film has been found to depend 

In order to convert this number to the absolute reflectivity Rw, we need to know R0 Si. This can be done using equation 5.5 again. The result at 436nm is R0Si = 0.44. Thus, as an example, if the reflectivity relative to silicon is measured to be 40% than the absolute reflectivity is 0.4x0.44=0.18. The 

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