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Rotatable cylindrical magnetron

Wright M, Beardow T (1986) Design advances and applications of the rotatable cylindrical magnetron. J Vac Sci Technol A 4(3) 388-392... [Pg.1143]

Utilization of sputtered material can be high - e.g. rotatable cylindrical magnetron. In situ surface preparation is easily incorporated into the processing. [Pg.277]

Magnetron, rotatable cylindrical A planar-like magnetron configuration where the target... [Pg.652]

See other pages where Rotatable cylindrical magnetron is mentioned: [Pg.281] [Pg.690] [Pg.281] [Pg.690] [Pg.1141] [Pg.251] [Pg.257] [Pg.412] [Pg.318]

See also in sourсe #XX -- [ Pg.175 , Pg.251 ]

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Magnetron