Resists, combined positive-negative

New Stable Resists-Combined Positive-Negative Resists... 

There may be some niche application for laser ablation and designed polymers, e.g., for arrays of structures which could be accomplished by novel systems, such as the combined resists. The application of this combined positive-negative resist is still under discussion. 

Consider a cell with one positive and two negative electrodes where the latter are at different distances, and I2, from the former (Fig. 18.3). We shall assume for the sake of simplicity that polarization of the electrodes is proportional to current density [i.e., AE = pi (p is the combined polarization resistance of the positive and negative electrodes)]. The voltages of the two halves of the cell, which are in parallel, are identical hence, the snm of ohmic losses and polarization in the two halves shonld also be identical. The ohmic losses in the electrolyte are given by IH<3. Thus,... 

Resist materials can be classified as positive or negative on the basis of their radiation response as described in Section 3.1 and illustrated in Figure 1. Both resist types can be subdivided into two categories depending upon the basic nature of their design 1) one-component systems and 2) two-component systems (see Figure 2). One-component systems are polymers that combine radiochemical reactivity with etch resistance and film-forming characteristics. In two component systems, the resist is formulated from an... 

These results confirm the potential of poly (p-formyloxystyrene) as a useful resist material combining such interesting properties as ability to be imaged in both positive or negative tone, ease of preparation, and activity in the deep UV, with a moderate sensitivity and good contrast. 

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