Resist polyfmethyl methacrylate

X-ray diffraction data are given for 182.221 2,4,6,8-Tetrathiaadamantane-thiol was tested for antibacterial and antiviral activity.222 1,3,5,7-Tetraalkyl-2,4,6,8-tetrathiaadamantane derivatives are used for lubricant additives.223 Polyfmethyl methacrylate) with good resistance to heat and air oxidation is prepared by polymerization of the monomer in the presence of 182.224... 

Apart from multi-level layer resist systems, conventional positive-tone resists can be classified into two categories one-component and two-component systems. Classical examples of the former systems are polyfmethyl methacrylate), and poly (butene-1-sulfone) (2,3). Typical examples of the latter system are AZ-type photoresists, which are mixtures of cresol-formaldehyde-Novolak resins and a photoactive compound acting as a dissolution inhibitor... 

As may be expected of an amorphous polymer in the middle range of the solubility parameter table, polyfmethyl methacrylate) is soluble in a number of solvents with similar solubility parameters. Some examples were given in the previous section. The polymer is attacked by mineral acids but is resistant to alkalis, water and most aqueous inorganic salt solutions. A number of organic materials although not solvents may cause crazing and cracking, e.g. aliphatic alcohols. 

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