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Resist modulation index

In equation 1, bmin is the minimum feature size transferable, A is the wavelength of light, s is the separation between the mask and the substrate, and d is the thickness of the resist layer. In projection printing, a series of undulating maxima and minima are produced. Because of mutual interference, the dark region is never completely dark, and the maximum brightness does not correspond to 100% transmission. The quality of transfer can be conveniently indicated by the modulation index, M, which is defined as follows ... [Pg.336]


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See also in sourсe #XX -- [ Pg.328 ]




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