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Resist materials organometallic polymers

The first symposium on Organometallic Polymers, held at the National Meeting of the American Chemical Society in September 1977> attracted a large number of scientists interested in this field, both established investigators and newcomers. Subsequent symposia in 1977, 1979, 1983, and 1987 have seen the field mature. Hundreds of papers and patents have been published. Applications of these materials as semiconductors and one-dimensional conductors, as radiation shields or as photo-resists, as catalysts, as controlled release agents for drugs and biocides and a wide variety of applications have been studied (see Chapter 1). [Pg.427]


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