Relative control optimization criterion

If the analysis to be optimized involves a sample in which the relative peak areas are expected to be constant (for instance in a quality control situation), then a criterion may be used that is affected by the relative peak height (A), i.e. FO or Pv may be used. If this is not the case, then a criterion should be selected that does not vary with A ( Rs or S P or P"). This will avoid the very unattractive situation in which the location of the optimum is a function of the (quantitative) composition of the sample, so that in theory there may be different optimum conditions for every single sample ... 

A general criterion for optimizing the metal CMP process is the controlled regulation of material removal, while simultaneously securing the processed surface from various CMP-related defects like scratches, dishing, delamination, erosion, contamination, line deformation, and galvanic corrosion (Baneijee and Rhoades, 2008 Choi and Korach, 2009). The considerations for improving material removal rates (MRRs) are mostiy relevant in the context of bulk Cu CMP, but are relatively less critical for the thin (<5 nm) diffusion barrier metal films. However, the requirement for defect control continues to remain a major issue in essentially all cases of metal CMP (Chandrasekaran et al., 2004). 

A deterministic objective function is chosen for the optimization problem, and it corresponds to the total volume of the column elements. To control serviceability and minor damage, the design criterion considered in this example problem is defined in terms of the interstory drift ratio in the x and y direction over all stories of the building, and the relative rotation between consecutive floors. Therefore, the number of response functions involved in the problem is 18 and the system failure event F is defined as... 

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