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Reactions on silicon surfaces

A large number of processes in the microelectronics and chemical industries depend on the chemical reactions occurring on solid surfaces. The STM provides an unparalleled opportunity to study those chemical reactions at the atomic level. In this section, we will describe two reactions on silicon surfaces that are directly related to the understanding of the processes of manufacturing silicon devices. [Pg.334]


See other pages where Reactions on silicon surfaces is mentioned: [Pg.172]    [Pg.41]   
See also in sourсe #XX -- [ Pg.60 , Pg.61 , Pg.62 ]




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