Radiofrequency and Microwave Discharges in Plasma Chemistry

The plasma temperature in the metallic cylindef can be expressed as (/ is ionization potential) 

Conductivity am strongly depends on temperature, whereas Tm and Xm are changing only slightly therefore, am a ihnf. Then, the Saha equation results in weak logarithmic dependence Tm(/o, )  

The dependence of ICP power per unit length on solenoid current and frequency can be shown as 

Typical atmospheric pressure thermal RF-ICP discharge (/ = 13.6MHz, tube radius 3 cm) has a temperature of about 10,000 K, thermal conductivity Xm = T4 10 W/cm K, electric conductivity am 25 Ohm cm , and skin layer 5 0.27 cm. The electromag- 

ICP discharges at moderate to high pressures usually generate thermal plasma, whereas the RF-CCP discharges in the same conditions can generate non-thermal plasma. 

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