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Pyrimidine derivatives as lithographic materials

Y. Inaki, M. J. Moghaddam, K. Takemoto, Pyrimidine Derivatives as Lithographic Materials, in E. Reichmanis (Ed.), Polymers in Micro-lithography Materials and Processes, ACS, Washington DC, 1989. [Pg.692]

Inaki, Y, Photochemistry of pyrimidine derivatives as lithographic materials, Polym. Mater. Sci Eng., 60, 165, 1989. [Pg.2150]

Inaki, Y, Moghaddam, M.J., and Takemoto, K., Pyrimidine derivatives as lithographic materials, Polymers in Microlithography Materials and Process, Reichmanis, E., MacDonald, S.A., and Iway-anagi, T., Eds, ACS Symp. Ser., 412, 303,1989. [Pg.2150]

See other pages where Pyrimidine derivatives as lithographic materials is mentioned: [Pg.303]    [Pg.305]    [Pg.307]    [Pg.309]    [Pg.311]    [Pg.313]    [Pg.315]    [Pg.317]    [Pg.303]    [Pg.305]    [Pg.307]    [Pg.309]    [Pg.311]    [Pg.313]    [Pg.315]    [Pg.317]   


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Pyrimidine derivatives as lithographic

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