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MATERIALS FOR MICROLITHOGRAPHY

Miller RD, Hofer D, McKean DR, Willson CG, West R, Trefonas P (1984) in Materials for Microlithography, Thomson L, Willson CG, Frechet JMJ (eds), ACS Symposium Series 266, American Chemical Society, Washington, DC... [Pg.42]

This book emphasizes the technological significance of the effects of radiation on polymers and draws attention to the major interactions between fundamental science and advanced technology. Although the field of polymer radiation chemistry is not exhaustively covered, a sampling of the ongoing basic and applied research in this area is presented. Review chapters have been included that cover fundamental radiation chemistry, spectroscopic methods, materials for microlithography, and radiation-durable materials. [Pg.277]

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Microlithography

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