Purging of the Gas Supply System

Gas purity Class 5,0 Class 6-0 Class 6.0 and higher, and semiconductor process gases [Pg.274]

Pressure r ulator Material brass or stainless steel, specially cleaned, He-leak rate 10 kPa L s, elastomere or a metal diaphragm Material predominantly stainless steel, specially cleaned, He-leak rate 10 kPa L s, stainless steel diaphragm Material stainless steel, electropolished, high surface quality, He-leak rate lo kPa L s, stainless steel diaphragm, minimized dead volume, free of non-ferrous metals, deanroom assembled, minimum particulate emission [Pg.274]

Valves Diaphragm-type seal, rarely packing seal or 0-ring seal Diaphragm-type seal. Bellows-type seal Diaphragm-type seal, bellows-type seal electropolished, minimized dead volume [Pg.274]

Piping Material copper or stainless steel, specially cleaned Material stainless steel specially cleaned or electropolished Material stainless steel, electropolished [Pg.274]

Pipe connections Flux-free brazed, orbital welded Orbital welded Orbital welded [Pg.274]

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