Propylene glycol methyl ether acetate PGMEA

Resist materials must satisfy a long list of requirements to be successful induding the following (1) good solubility in safe solvents (e.g., ethyl lactate and propylene glycol methyl ether acetate (PGMEA)), (2) ability to form tmiform defect-free thin films. [Pg.40]

PGMEA. See Propylene glycol methyl ether acetate... [Pg.1268]

P-PGME. See 3-Methoxy-1-propanol PGMEA. See Propylene glycol methyl ether acetate... [Pg.3279]

Note PGMEA propylene glycol 1-mono-methyl-ether-2-acetate NMP n-methyl pyrrolidone EL ethyl lactate TMAH tetramethyl ammonium hydroxide BOE buffered oxide etch TEOS tetraethyl orthosilicate TDMAT tetrakis(dimethylamido) titanium IPA isopropyl alcohol or 2-propanol. [Pg.464]