Principle and characteristics of ERDA

Since one can obtain the depth vs. concentration profiles of all the species (lighter than the projectile) present in the sample with a sensitivity of 0.1% and a depth resolution of 20 nm, this results in as many spectra as elements present in the sample, each one revealing the depth distribution 

Detection Starting from hydrogen, detection of almost aU elements possible Depth profihng of elements is also possible 

Standard Conditions 20 100MeV heavy ion beam (2 MeV He for hydrogen detection) ToF, magnetic, gas detector 10min per sample 

General Mainly appUed for hydrogen, simultaneous profiles of all elements accessible depth range 1 pm light elements detectable on heavy substrates 

The particle identif3dng detection techniques are used to separate the forward scattered ions and recoils from the target with respect to their energy and atomic number/mass by one of the detection systems mentioned Sect. 3.4.1. 

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Principle and Characteristics of ERDA 149 3.2.3 Stopping Power and Straggling... 

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