Primary Ion Beam Operation Modes

t Prints Ion Beam Operation Modes Aside from the plethora of primary ion types, there also exists a range in primaiy ion impact energies, primary ion incidence angles, and primary ion currents available. 

The choice of primary ion beam type is dependent on the elements/molecules of interest, the damage that can be accepted, and the sensitivity/detection limits required. 

The spntter rate (sputter rates increase with increasing energy) 

The depth resolution (depth resolution degrades with increasing energy) 

The beam spot size (the beam diameter decreases with increasing energy) 

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