Preparation Method of SAMs by CVD

We used n-type Si (100) plates (10mm x 10mm x 0.4mm) as substrates. The raw materials used are the following four types of organosilane compounds, whose molecular structures are shown in Fig. 4. 

We denote the SAMs prepared from these compounds as ODS-, FAS3-, FAS 17- and AHAPS-SAMs hereafter. 

We used the UV/ozone cleaning method for the cleaning of substrates [43], An Xe excimer lamp with the wavelength 172nm (UER 20-172, Ushio Inc.) was used for the UV light source. The principle and method of the UV/ozone cleaning are described below. 

An excimer lamp has dual quartz-tube structure, where a metal electrode is set at the inner side of the inner tube, and a mesh-type metal electrode is placed at the outside of the outer tube as shown in Fig. 5. When we apply ac high voltage between two electrodes, the dielectric barrier discharge ignites between two dielectric materials, and reaches an excimer state instantaneously by the excitation of atoms of a filling gas. Then the excimer light is emitted by the 

Dielectric (Quartz glass) Mesli-type metal electrode 

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