Prebaking conditions

For lithographic evaluation, films of P(MM-AMS) were cast from solutions in 2-ethoxyethanol and prebaked one hour at 150°C. Under these prebake conditions, the ester was converted largely back to the anhydride as... 

Thermal analysis studies. Thermomechanical analysis (TMA) has been used for the in situ determination of the resist thermal properties after processing steps (12). In the present study, TMA showed the influence of the sample preparation, the prebake conditions and formulation parameters (MW distribution of the polymer) to the resist glass transition temperature (Tg) (Table 1). 

Compared with conventional DOS-oiled sheets, those oiled with ATBC with a high polar group concentration change less in surface condition by prebaking and thus, have no de-adhesion of UVC lacquer in wicket-contact portions. 

The coating must be prebaked to remove solvent and in the process the polyamic acid coating is partially imidized. The degree of this bake determines the conditions for etching and stripping. 

Figure 11.46 Effect of postbake on different feature sizes (0.5 xm and a large pad) patterned on a 1.29- xm-thick DNQ/novolac resist (AZ7512 from AZ Corporation). Processing conditions prebake 110°C, exposure dose 200 mJ/cm, PEB 110°C, development TMAH puddle for 51 seconds. ...

Figure 4. DSC curve of epoxy novolac resist after prebake and exposure at a low dose (0.2sec exposure time vs. 2 sec for the lithographically useful dose in the same conditions).

C02)- The prebaked anodes are produced in more controlled conditions leading to better-defined structures. These lead to lower cell voltages and higher current efficiencies. In addition, external thermal treatment allows much superior control of emissions to the environment. 

The reaction is carried out under an argon atmosphere in a prebaked Schlenk tube. The polymerization is initiated by adding a monomer solution (0.375 M, 4mL) to Rh complex solution (30 mM, ImL). The reaction is subsequently quenched by adding triphenylphosphine (0.18 mmol, 47 mg), and the mixture is poured into methanol (100 mL). Methanol-insoluble material is collected by filtration, washed with methanol, and then dried under vacuum at room temperature for several hours. Phenylacetylene derivatives bearing alkyl, alkoxy, and ester groups as ring substituents are also polymerizable with the same catalyst under similar reaction conditions (see Table 3.2 for the results). 

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