Porous silicon native oxide

To understand the electrochemical behavior of silicon, however, the formation and the properties of anodic oxides are important The formation of an anodic oxide on silicon electrodes in HF and HF-free electrolytes will therefore be discussed in detail in this chapter. The formation of native and chemical oxides is closely related to the electrochemical formation process and will be reviewed briefly. The anodic oxidation of porous silicon layers is closely related to the morphology and the luminescent properties of this material and is therefore discussed in Section 7.6. 

Ongoing investigations into the chemistry of porous silicon surfaces seek to develop methods for the preparation of chemically functional interfaces that protect the underlying silicon nanocrystallites from degradation without changing or annihilating their intrinsic behavior. The native, hydride-terminated surface is only metastable under ambient conditions and oxidation of freshly prepared porous silicon commences within minutes when exposed to air. While surface oxide can suitably passivate the nanocrystalline silicon and stabilize its photoluminescence, the electrically insulating and structurally defective character of this oxide layer... 

Fig. 1 Comparison of the magnetization curves of bare n silicon (full line), as-etched porous silicon prepared from the same wafer (dotted line), and aged porous silicon offering a native oxide layer (dashed line). All three samples show a diamagnetic behavior, whereas the estimated susceptibility varies between —1.2 10 (Si), —7.5 10 (as-etched), and —2.6 10 (aged). The measurements have been performed at T = 4.2 K. The diamagnetic behavior of porous silicon decreases if the sample is oxidized (in contrast to hydrogen terminated) which might be caused by the occurrence of dangling bonds...

Triclosan Loaded Porous Silicon Flakes (as-anodised, native oxide)... 

The SiC Schottky diodes and capacitors that have been processed by the authors were processed on either 6H or 4H substrates (n-type, about 1 x 10 cm ) with a 5-10- m n-type epilayer (2-6 x lO cm" ) [123, 124]. A thermal oxide was grown and holes were etched for the metal contacts. In the case of the Schottky sensors, the SiC surface was exposed to ozone for 10 minutes before deposition of the contact metal. This ozone treatment produces a native silicon dioxide of 10 1 A, as measured by ellipsometry [74, 75]. The MISiC-FET sensors (Figure 2.9) were processed on 4H-SiC, as previously described [125]. The catalytic metal contacts consisted of 10-nm TaSiyiOO-nm Pt, porous Pt, or porous Ir deposited by sputtering or by e-gun. 

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