Polystyrene-based cross-linking negative

Table 3.5. Polystyrene-Based Cross-Linking Negative DUV Resists...

We are interested in the application of polymers as adsorbents, ion exchangers, fuel cells, and permeable materials. In this regard, the first resins with some of these properties were obtained by D Aleleio in 1944 based on the copolymerization of styrene and divinylbenzene. Unfunctionalized polystyrene resins cross-linked with divinylbenzene (Amberlite) are widely applied as adsorbents [191,192], In addition, the polystyrene-divinylbenzene resins functionalized with sulfuric acid (sulfonation) to create negatively charged sulfonic sites are applied as cation exchangers, and treated by chloromethylation followed by animation produce anionic resins [193,194],... 

When some or all of the phenyl rings are substituted with halogen (Scheme 6.11), the radiation sensitivity and the cross-linking efficiency of polystyrene can be enhanced significantly. Negative electron-beam resist formulated from iodi-nated and chlorinated polystyrene and based on this approach have been reported. Sensitivity of about 2 p.C/cm and resolution of about 1-p.m features have been demonstrated with these materials. ... 

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