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Polyimide V-groove joint

FIGURE 14.9 Chip with V-groove polyimide thermally actuated legs (left). Cross-section schematic of one of the actuators (right). (From Ebefors, T., Polyimide V-groove joints for three-dimensional silicon transducers. Department of Signals, Sensors, and Systems. Royal Institute of Technology (KTH), Stockholm, Sweden, 2000.)... [Pg.1580]

Ebefors, T. 2000. Polyimide V-groove joints for three-dimensional silicon transducers. Department of Signals, Sensors, and Systems. Stockholm, Sweden Royal Institute of Technology (KTH). [Pg.1592]

The polyimide V-groove joint actuator has been developed for walking microrobot applications but also for use in... [Pg.57]

Schematic of actuation principle based on a four V-groove joint. By heating the joint a horizontal displacement Ax is obtained due to greater thermal expansion of the polyimide at the top of the V-groove than at the bottom (adapted from Ebefors, 2000)... Schematic of actuation principle based on a four V-groove joint. By heating the joint a horizontal displacement Ax is obtained due to greater thermal expansion of the polyimide at the top of the V-groove than at the bottom (adapted from Ebefors, 2000)...
See other pages where Polyimide V-groove joint is mentioned: [Pg.57]    [Pg.92]    [Pg.57]    [Pg.92]    [Pg.58]   


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