Plasma processing molecular dynamics simulations

David B. Graves and Cameron F. Abrams, Molecular Dynamics Simulations if Ion-Surface Interactions with Applications to Plasma Processing Christian M. Lastoskie and Keith E. Gubbins, Characterization of Porous Materials Using Molecular Theory and Simulation... 

MOLECULAR DYNAMICS SIMULATIONS OF ION-SURFACE INTERACTIONS WITH APPLICATIONS TO PLASMA PROCESSING... 

The topic of this article is the use of molecular dynamics (MD) simulations of positive ion-surface interactions for insights into the chemical and physical processes that occur at surfaces immersed in glow discharge plasmas. To understand the signihcance of this topic, it is necessary to have some background in the technology and its major industrial application (Lieberman and Lichtenberg, 1994). The term plasma in this context refers... 

This complicated situation is fundamentally different from small linear plasma devices, in which the MAR chain has been seen to lead to enhanced plasma recombination In a tokamak divertor, distinct from these divertor-simulation experiments, the molecular pressure is not an externally controlled parameter but must be established by the recycling plasma itself. Detailed and consistent modeling, verified by dedicated spectroscopy, shows that processes that lead to a reduction of the molecular density (such as MAR and MAD), therefore, can have entirely different effects on plasma dynamics in real divertors and in divertor simulators. 

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