Plasma polymerization magnetic discharge

The plasma polymerization reactor used is schematically shown in Figure 5.5. Parallel electrodes, equipped with magnetic enhancement, by a 10-kHz power source created glow discharge of the monomer. A thickness monitor sensor is placed at the projected circumference of electrodes intercepting the midelectrode plane. The electrodes are 13.2 cm in diameter and 6.1cm apart. The thickness monitor surface is perpendicular to the plane parallel to the electrodes. 

Use of a magnetron enables us to operate plasma polymerization at rather high energy input levels by virtue of low FM and the small glow volume, which often cannot be achieved by the ordinary glow discharge without magnetic confinement. Certain characteristics of plasma polymers can be obtained only under conditions of... 

Sato, K. Yeh, Y.S. Yasuda, H. Plasma polymerization by magnetron glow discharge. II. Effect of magnetic field on chemical characteristics of plasma polymers of tetrafluoroethy-lene revealed by electron spectroscopy for chemical analysis. J. Vac. Sci. Technol. A 1989, 7, 3188. 

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