Glow discharge magnetron

Figure 3.11 TMS glow discharge a cathode (steel plate) and two magnetron anodes, 1 seem, SOmtorr, 5W.

Figure 14.1 Confining effect of magnetron glow discharge. The upper and lower reactors have identical electrode systems, except that the upper electrodes have no magnetic enhancement and are operated at identical glow discharge conditions. Argon, 0.40 cm sxp/iiiin 46mtorr 5W 10 kHz.

Use of a magnetron enables us to operate plasma polymerization at rather high energy input levels by virtue of low FM and the small glow volume, which often cannot be achieved by the ordinary glow discharge without magnetic confinement. Certain characteristics of plasma polymers can be obtained only under conditions of... 

Figure 14.19 V-I curves for the argon magnetron glow discharge plasma at a pressure of 30 mtorr.

Figure 14.21 Drop of voltage as a function of magnetic field strength in argon magnetron glow discharge plasmas.

Figure 14.29 The effect of WjFM on the percent of copper content in the plasma polymer of methane obtained in methane magnetron glow discharge plasmas.

Magnetron glow discharge enables us to operate at much lower pressure where nonmagnetrons cannot create a glow discharge. 

Glow discharge of a monomer at a given pressure can be operated at much higher wattage levels with magnetrons. 

Figure 15.1 Schematic view of cathode-magnetron DC glow discharge of argon in the interelectrode space interelectrode distance = 102 mm, the luminous regions are shown shaded.

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