Plasma electron sources

As a result of miniaturization several electrical extremes are concentrated on the chip area of ca. 1 cm2 There are DC-voltage-sources in range of -2,000 to 200 V driving electrodes and the MCP, the micro-plasma electron source is powered by a RF-generator at 2.45 GHz, which is ignited by an arc discharge. For the ion separation steep pulse trains of several volts up to 270 MHz with a bandwidth of... 

Radiation Sources. Ordinarily, electron beams are produced from soHds in vacuo by thermal or field-assisted processes. Plasmas also serve as electron sources, but are more uniquely used as ion sources. Whereas ions can be produced by sputtering and field assisted processes in the absence of plasmas, most ion sources involve plasmas (75). 

I.I. Electron Bombardment Plasma Sources. These gas-feed sources generally employ Ar or Xe at relatively low vapour pressures (10 3mbar). A heated cathode is a common electron source, and these are accelerated towards an anode to give them... 

The electron source of the PIMMS is an argon plasma. Inside the plasma chamber the gas is ionized by a 2.45 GHz microwave field, ignited by an electric spark. In the plasma chamber free electrons are created, that are accelerated by a static electric field for impact ionization of the sample gas atoms. The layout of the plasma chamber has to incorporate both the fluidic and the electrostatic requirements. On the one hand the gas apertures of the chamber must have the appropriate dimensions to assure that the gas flow out of the chamber is low. On the other hand the geometry must be such that most of the electrons are generated close to the outlet of the chamber and can be extracted through this small aperture. Electrons should be generated close to the acceleration field, which intrudes the chamber only to a small depth. 

Fig. 11.1. Principle of the nonlinear Thomson scattering X-ray source. The nonlinear motion of the free plasma electrons oscillating in the strong electromagnetic laser held (ao) produces high harmonics of the fundamental laser light that can reach the X-ray spectral range. As ao is increased, the radiation becomes more collimated...

At Argonne, a new positive ion injector for ATLAS based on an electron cyclotron resonance (ECR) plasma ion source is under construction (40). The... 

It might therefore be possible that an electronically excited SF5 ion could attach a second electron to form SF , particularly if a cool plasma ion source were employed. Both Stapleton and Bowie and Stuckey and Kiser have observed the SF5 ion with the ICR and omegatron spectrometers. 

Determination of the temperature distribution induced by laser, electron, or plasma beam sources is relevant in operations such as surface transformation hardening of metals, drilling, cutting, annealing, shaping, and micromachining. Descriptions of beam-generating devices as well as discussions of applications are available [7-15]. 

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