Plasma-Chemical Synthesis of NF3 and Other Nitrogen Fluorides

Plasma-Chemical Synthesis of NF3 and Other Nitrogen Fluorides 

Especially interesting is plasma-chemical synthesis in the mixture NF3-ASF5-F2 (composition 1 1 2), which results in the formation of NF4ArF6. This fluorine oxidizer is a derivative from NF5, which is not stably synthesized by itself The mechanism of synthesis 

Guertin, Christe, and Pavlath (1966) considered another mechanism of NF4ArF6 synthesis in plasma through a set of ion-molecular reactions. The mechanism starts with the formation of positive ions (NF and Fj through ionization, and the formation of negative ions (F ) through dissociative electron attachment to NF3, AsFs, or F2 molecules. The initial positive ions lead to the formation of an ion radical NF4  

A reacts with AsFs in three-body collision and forms the complex negative ion AsFg F + AsFs + M AsFg - - M. (6-116) 

Finally, fast ion-ion recombination of NF4 and AsFg leads to formation of the product - 

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