Piezoelectric Materials for Microelectromechanical Systems

Microelectromechanical systems (MEMS) are devices capable of sensing and responding to a mechanical or an electrical stimulus. One common MEMS device that is in commercial production is the miniature accelerometer (a device used to measure acceleration) used 

The most widely studied ceramics for MEMS applications are the PZTs because of their high k and high k. Thin films of PZT have been used in the fabrication of a range of different MEMS and can be integrated with silicon IC processing methods. Eigure 31.23 illustrates some of the process steps used to fabricate a cantilever beam microsensor such as an accelerometer. The actual processing sequence requires over 50 individual steps. 

MEMS APPLICATIONS USING PIEZOELECTRIC THIN FILMS 

Accelerometers Acoustic sensors Infrared detectors Hot-wire anemometers Microvalves Micropumps Stepper motors 

PZT films can be prepared using physical vapor deposition (PVD) methods such as sputtering, chemical vapor 

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