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Photoresist lithographic performance

Method for a Comparative Study of Positive Photoresist Lithographic Performance... [Pg.65]

WALKER AND HELBERT Positive Photoresist Lithographic Performance 67... [Pg.67]

This paper addresses photoresist lithographic performance only. For a more complete view of these systems, the accompanying paper should be read where thermal flow characteristics as well as plasma etch resistance data are presented and compared for many of the photoresists evaluated in this work. [Pg.73]

WALKER and Helbert Positive Photoresist Lithographic Performance 75... [Pg.75]

Two-level glass etch was also performed first over photoresist for shallow etch (10 pm), and then over black lithographical masking tape for deep etch [117]. [Pg.10]

The structure ofthis polymer was confirmed by NMR-spectroscopy [157], Such copolymers can be formulated into a high performance positive photoresist. By comparison, a physical blend of a phenolic and poly-4-hydroxystyrene was not useful because of its slow kinetics of mixing. Therefore, the synthesis of a copolymer of both components yields a material with improved lithographic... [Pg.649]

See other pages where Photoresist lithographic performance is mentioned: [Pg.77]    [Pg.77]    [Pg.56]    [Pg.128]    [Pg.65]    [Pg.65]    [Pg.604]    [Pg.311]    [Pg.192]    [Pg.237]    [Pg.670]    [Pg.241]    [Pg.47]    [Pg.604]    [Pg.314]    [Pg.61]    [Pg.266]    [Pg.102]    [Pg.250]    [Pg.63]    [Pg.116]    [Pg.2767]    [Pg.966]    [Pg.139]    [Pg.5637]    [Pg.173]    [Pg.115]    [Pg.1673]    [Pg.354]    [Pg.74]    [Pg.578]    [Pg.258]    [Pg.278]    [Pg.40]    [Pg.47]   
See also in sourсe #XX -- [ Pg.65 , Pg.66 , Pg.67 , Pg.68 , Pg.69 , Pg.70 , Pg.71 , Pg.72 , Pg.73 , Pg.74 , Pg.75 ]



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Lithographic

Lithographs

Photoresist

Photoresist photoresists

Photoresistance

Photoresists

Positive photoresist lithographic performance

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