Phenomenon of Neutral-Particle Trapping in Silane Plasma

Critical Phenomenon of Neutral-Particle Trapping In Silane Plasma 

For a 5-nm particle, k = Q cm /s for a 2-nm particle, = 3 10 cm /s. Neutral particle trapping requires at least one electron attachment during the residence time tr  

The nanoparticles with size limited by are conceived by dissociative attachment (8-127) and lost due to the gas flow, which permits estimation of their density as 

Formation of the 2-nm particles effectively trapped in plasma is determined at T 300 K by the slow process of electron attachment to the nentral particles with less than Acri 

It can be presente4 taking into account (8-140) and (8-141), as the relation between the rate of particle production, and the initial negative ion SiHj production by dissociative 

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