Pads and Their Manufacture

Polishing pads used in semiconductor applications can be grouped into four main classes based on their structural characteristics. These are 

Class I. Felts and polymer impregnated felts Class 11. Microporous synthetic leathers Class III. Filled polymer films Class IV. Unfilled textured polymer films 

A tabular summary of these pad types, with subcategories, common trade name varieties, applications, and property ranges is given in Table I. 

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