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Pad Deformation

These two equations show that the pad deformation is proportional to the applied load and inversely proportional to the pad material stiffness (represented by the Young s modulus). The equations involve complete elliptic integrals that can be readily evaluated numerically. The relative deformation represented by Eqs. (24) and (25) is plotted in Fig. 13, where the inner region corresponds to Eq. (24) and the outer corresponds to Eq. (25). [Pg.111]

The viscoelasticity of a polishing pad has been shown to play an important role in the CMP process [59]. Fu and Chandra [55] in a viscoelastic pad deformation model showed that MRR decay for an unconditioned pad is strongly influenced by the viscoelasticity of the pad. Guo et al. [60] investigated the effects of pad viscoelasticity on dishing and erosion without considering pad roughness (asperity height distribution). [Pg.147]

Fu G, Chandra A. A model for wafer scale variation of material removal rate in chemical mechanical polishing (CMP) based on viscoelastic pad deformation. J Electron Mater 2002 31(10) 1066-1073. [Pg.168]

Tso and Ho s [47] and Liao s [71] models focus more on the relationship between conditioner parameters and the pad wear rate (MRR). However, Tso and Ho utilize the Preston equation while Liao s model presumes metal cutting theory. On the other hand, Homg s [72] model calculates pad deformation across the pad, which is not accounted for by the other models. These aforementioned models are summarized in Tables 13.5 and 13.6 in terms of model illustration, assumptions, derivations, and main conclusions. [Pg.343]

The ability of such bearings to, in fact, provide significant load capacity is explained when pad deformations and viscosity variations are included in the analysis. This is well accepted today, and these factors are included in design analysis programs, (6) and (7) for example, for tilting pad thrust bearings. Early recognition of the influence of pad deformations on the load capacity of center pivot pads was provided by Raimondi (8). [Pg.114]


See other pages where Pad Deformation is mentioned: [Pg.24]    [Pg.110]    [Pg.110]    [Pg.111]    [Pg.166]    [Pg.146]    [Pg.451]    [Pg.156]    [Pg.158]    [Pg.47]    [Pg.49]    [Pg.63]    [Pg.64]    [Pg.70]    [Pg.217]    [Pg.105]    [Pg.118]    [Pg.341]    [Pg.343]    [Pg.357]    [Pg.132]   
See also in sourсe #XX -- [ Pg.156 , Pg.158 ]




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Padding

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