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Non-Thermal Plasma Etching of Polymer Materials

Polymer He plasma, eteh rate g/(em h) N2 plasma, etch rate g/(em h) O2 plasma, etch rate g/(cm h) [Pg.637]

Contribution of Eiectrons and Ultraviolet Radiation in the Chemical Effect of Plasma Treatment of Polymer Materials [Pg.637]

Softer UV radiation from a mercury lamp (typical wavelength 253.7 nm) does not produce the intermolecular cross-links in PE. [Pg.638]


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Non-thermal plasma

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Plasma-etched

Polymer etching

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Thermal plasma

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