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Non-Equilibrium Microwave Discharges of Moderate Pressure

Plasma-Chemical Experiments with Dissociation of CO2 in Non-Equilibrium Microwave Discharges of Moderate Pressure [Pg.295]

The experimental dependence of the energy efficiency on gas presstrre is presented in Fig. 5-26. The dependence shows that the optimal presstrre for CO2 dissociation in the [Pg.295]

Experimental Diagnostics of Plasma-Chemical Non-Equilibrium Microwave Discharges in Moderate-Pressure CO2 Plasma Measurements [Pg.296]

The corresponding space-averaged values of the electron density and electron-neutral collision frequency Ven are presented in Fig. 5-28. Variation of pressure corresponding to the change in the discharge mode from quasi-uniform (at lower pressures) to filamentary (at higher pressures, see Section 5.5.1) leads to a two-order-of-magnitude increase in the electron concentration. [Pg.297]


Experiments with Non-Equilibrium Microwave Discharges of Moderate Pressure, Discharges in Waveguide Perpendicular to Gas Flow Direction, and Microwave Plasma Parameters in CO2... [Pg.293]




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Equilibrium pressure

Microwave discharge

Microwave moderate-pressure discharge

Moder

Moderant

Moderants

Moderates

Moderation

Moderation, pressure

Moderator

Non-equilibrium

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