Nanoelectromechanical systems, fabrication

From a reaction engineering viewpoint, semiconductor device fabrication is a sequence of semibatch reactions interspersed with mass transfer steps such as polymer dissolution and physical vapor deposition (e.g., vacuum metallizing and sputtering). Similar sequences are used to manufacture still experimental devices known as NEMS (for nanoelectromechanical systems). 

Electrochemically Fabricated Microelectromechanical Systems/ Nanoelectromechanical Systems (MEMS/NEMS)... 

D machining of electrochemically active materials, including the construction of unconventional island patterns on a surface with nanoscale resolution, was also realized by this method [95, 115-117]. Thus, electrochemical machining can be applied to microelectromechanical systems (MEMS] [118] and even in the nanoelectromechanical systems (NEMS]. Electrochemical methods can realize the nanofabrication in a selective place and make the complicated 3D nanostructures. Conducting polymers can also be fabricated in this way. Similar to the electrochemical machining, by application of short voltage pulses to the tool electrode in the vicinity of the workpiece electrode, the electropolymerization... 

Apart from MEMS resonators, there has been significant development in the area of NCD-based nanoelectromechanical systems (NEMS) resonant structures. L. Sekaric et al. [40] developed a ring oscillator fabricated out of a 30-nm NCD film with a gold electrode on top. Figure 12.9 shows the SEM image of the nano resonator. 

---