Multilayer soft lithography

The top microfluidic architecture was fabricated using a multilayer soft lithography technique with polydimethylsiloxane (PDMS). In the figure, we illustrate a... 

Multilayer sheet extrusion, VDC copolymers in, 25 725, 734 Multilayer soft lithography, for lab-on-a-chip valves, 26 975... 

Multiple valves have been constructed on a PDMS valve control layer (see Figure 3.27) [167]. Multilayer soft lithography has been used to generate the valve control layer (4 mm thick for strength) plus a fluid layer (40 pm thick) on PDMS. The small Young modulus ( 750 kPa) of PDMS allows a large deflection (1 mm) to be produced using a small actuation force ( lOOkPa on a 100- x 100-pm valve area). The response time is on the order of 1 ms. Round channels were... 

Unger, M.A., Chou, H., Thorsen, T., Scherer, A., Quake, S.R., Monolithic micro-fabricated valves and pumps by multilayer soft lithography. Science 2000, 288, 113-116. 

As an alternative to traditional MEMS techniques, multilayer soft lithography (MSL) enables the facile and inexpensive large-scale integration of valves on chip [22, 23[. MSL is an extension of the technique of soft lithography [24], which uses... 

Rg. 11.2 Flow diagram illustration of the technique of multilayer soft lithography. 

M.A. Uuger, H.P. Chou, T. Thorseu, A. Scherer, aud S.R. Quake, Mouolithic microfabricated valves aud pumps by multilayer soft lithography, Scieuce, 288, 113-116, (2000). 

A technique was developed called multilayer soft lithography that combines soft lithography with the capability to bond multiple patterned layers of elastomer. 

Microflow is realized as either electroos-motic flow (EOF) or pressure-driven flow. EOF is in many cases not suitable for transport of cell media due to its high ionic strength additionally, the electrical fields may cause adverse effects on a cell population. Thus, pressure-driven flow generated by off-chip or on-chip pumps is preferable for cell assays. On-chip pumps are particularly convenient - of note, pumps formed by multilayer soft lithography have been applied to analyzing T-cell behavior in microfluidic devices [6]. 

Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR (2000) Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288 113-116... 

Optics, of multilayer soft-lithography coupling with... 

In 2000, Unger et al. first used an elastic material (PDMS) and standard soft lithography processes to demonstrate a pneumatic pump with a three-membrane-actuator layout controlled by three external electromagnetic valves (EMV)> respectively [1]. Multilayer soft lithography to fabricate the pump and typical microchannel size was... 

Optical measurement with a mono-color CCD camera 200 X 480 pm sensing area 0-10 psi and 2 % accuracy Multilayer soft lithography (MSL) Applicable to PDMS and suitable fin pressure drop measinements... 

---