Microreactor 100 -silicon/Pyrex

Therefore, a silicon-Pyrex multichatmel microreactor was developed that allows both ozone oxidation and the following reductive treatment in one reactor module. Figure 6.31 shows the microstructured reactor schematically. The small posts... 

Biochemical analysis on nanoliter scale is precisely carried out by micrototal analysis system (pTAS) which consists of microreactors, microfluidic systems, and detectors. Performance of the pTAS depends on micromachined and electrochemically actuated micropump capable of precise dosing of nanoliter amounts of liquids such as reagents, indicators, or calibration fluids [28]. The dosing system is based on the displacement of the liquid from a reservoir which is actuated by gas bubbles produced electrochemically. Electrochemical pump and dosing system consist of a channel structure micro-machined in silicon closed by Pyrex covered with novel metal electrodes. By applying pulsed current to the electrodes, gas bubbles are produced by electrolysis of water. The liquid stored in the meander is driven out into the microchannel structure due to expansion of gas bubbles in the reservoir as shown in Fig. 11.8. 

Figure 10.12 shows the fabrication steps of a chip-like microreactor made from a silicon wafer as described by Pattekar and Kothare [532]. Firstly, a 10-p.m thick photoresist layer was coated onto the silicon chip, which served as the etch mask for Deep Reactive Ion Etching (DRIE). Then the photoresist was removed and Pyrex glass was connected to the chip by anodic bonding to seal the channels. Teflon capillaries were then bonded as inlet/outlet connectors to the chip. On the reverse side of the chip, the photoresist was patterned, which served as an etch mask for a... 

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