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Microelectronics Processing: Chemical Engineering Aspects

Jensen, K. F. In Microelectronics Processing, Chemical Engineering Aspects Hess, D. W., and Jensen, K. F., Eds. ACS Advances in Chemistry Series 23 American Chemical Society Washington, DC, 1989 pp. 200-206. [Pg.190]

D. W. Hess and K. F. Jensen (eds.), Microelectronics Processing Chemical Engineering Aspects. ACS Advances in Chemistry Ser. 221. American Chemical Society, Washington, D.C., 1989. [Pg.428]

Microelectronics Processing Chemical Engineering Aspects Dennis W. Hess, editor, Klavs F. Jensen, editor p. cm.—(Advances in chemistry series, ISSN 0065-2393 221)... [Pg.4]

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