Microelectromechanical systems based approaches

A wide variety of solid-state sensors based on hydrogen-specific palladium, metal oxide semiconductor (MOS), CB, electrochemical, and surface acoustic wave (SAW) technology are used in the industry for several years. Microelectromechanical systems (MEMS), and nanotechnology-based devices for the measurement of hydrogen are the recent developments. These developments are mainly driven by the demands of the fuel cell industry. Solid-state approaches are gaining rapid popularity within the industry due to their low cost, low maintenance, replacements, and flexibility of multiple installations with minimal labor. 

An alternate approach to traditional batteries consists of using MEMS (microelectromechanical systems), microfabrication, and nanotechnologies to implement a variety of energy conversion microsystems. These power MEMS could provide electrical power, propulsion, or cooling based on traditional operating principles or on novel prin-... 

In parallel to the microelectromechanical systems (MEMS)-based approaches for miniaturizing of conventional power sources, micro/nanofluidics can provide new approaches for energy conversion systems [12] and take advantage of the specific phenomena that emerge by downsizing the fluidic systems. 

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