Micro-XRF System Components

Commercial systems consist of an optical microscope for observation of the sample area and an ED-based XRF systan with a low-power, microfocused X-ray source using Kumakhov optics, a filter wheel, and a detector (Si[Li], Si-PIN, SDD). The X-ray source is generally air-cooled, and 

Many systems have proprietary mapping software and a charge-coupled device (CCD) camera for visual observation of the area being measured. Applications of micro-XRF spectroscopy will be discussed in Section 8.2.8. 

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