Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Metal organic chemical vapour deposition MOCVD complexes

The bis-Cp titanium bis(/-butanethiolato) and bis(ethanethiolato) complexes have been used as a single-source precursors for the preparation of thin films of titanium sulfides by metal-organic chemical vapour deposition (MOCVD). The crystal and molecular structures of the precursor complexes have been determined for comparison with homologous complexes of the general formula Cp2Ti(SR)2.1618... [Pg.601]


See other pages where Metal organic chemical vapour deposition MOCVD complexes is mentioned: [Pg.332]    [Pg.160]    [Pg.236]    [Pg.587]    [Pg.247]    [Pg.332]    [Pg.29]    [Pg.2638]    [Pg.2637]   


SEARCH



Chemical complexation

Chemical complexes

Chemical complexity

Chemical organic vapours

Chemical vapour deposition (MOCVD

Chemical vapour deposition organic

MOCVD

MOCVD deposition

Metal deposition

Metal organic chemical vapour

Metal organic chemical vapour deposition MOCVD)

Metal organic complexation

Metal organic complexes

Metal vapour

Metal-organic deposition

Metallic metal deposits

Organic complexation

Organic deposition

Organic vapours

© 2019 chempedia.info