MEMS design

Figure 5.1 shows a tetrad of equilibrium reactions related to the partitioning of a drug between an aqueous environment and that of the bilayer formed from phospholipids. (Only half of the bilayer is shown in Fig. 5.1.) By now, these reaction types might be quite familiar to the reader. The subscript mem designates the partitioning medium to be that of a vesicle formed from a phospholipid bilayer. Equations (4.1)-(4.4) apply. The pAi m in Fig. 5.1 refers to the membrane pKa. Its meaning is similar to that of pAi when the concentrations of the uncharged and the charged species in the membrane phase are equal, the aqueous pH at that point defines pAi em, which is described for a weak base as...

This method is well suited to be implemented into the microfluidic and MEMS designs. 

N. Zhou, J.V. Clark, K. S.J. Pister, Nodal analysis for MEMS design using SUGAR version 0.5, Proc. Int. Conf. Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM98, Computational Publications, Cambridge MA, USA, April 1998, 308-313. 

A wide range of simulation tools and techniques are commonly used to support and accelerate the various steps of the MEMS design process. The different modeling techniques have their tradeoffs in simulation time, skill level requirements, limita-... 

The most abstract level of MEMS design is the use of block diagrams and mathematical spreadsheets to lay out the system architecture and evaluate the designeds first ideas and case studies. 

Strictly speaking, model order reduction (MOR) refers to compact model generation procedures that lump the spatial dependency of device behavior, extract the most typical characteristics of the governing equations, and, hence, reduce the order of the problem. MOR originally derives from control theory and is widely used in electronic and MEMS design. Many of the... 

The MEMS Handbook, Second Edition (3 volumes). Edited by Mohamed Gad-el-Hak MEMS Introduction and Fundamentals MEMS Applications MEMS Design and Fabrication... 

Beams are often subject to different boundary conditions and forces in MEMS design. A comprehensive reference for the bending of beams in different situations is Roark s formulas for stress and strain [4]. We considered a fixed-free cantilever beam that is subjected to a point load at its free end in the spring analysis above. The fixed-free boundary condition means that one end is fixed, so that both its displacement and slope do not change under the applied force. The other end of the beam is free to both move and change its slope in response to a point load F, as shown in Figure 2.7. In that case the deflection of the beam y(j ) as a function of position x is given by... 

Figure 2.22 Layout for a Fabry-Perot interferometer in the SOIMUMPS process. (From Mr. Dmitry Kozak and the MEMS Design students in EE115, Spring 2009.) See colour plate section.

Two M-Test structures [5] are shown in Figure 3.9. These test structures are useful for characterizing the mechanical properties of thin films such as Young s modulus, Poisson s ratio, and residual stress. They are also very common elements in MEMS design. In this problem we will determine the pull-in voltage of the cantilever beam (CB) and fixed-fixed beam (FB) analytically. 

Figure 4.11 (Left) Tip of the mirror by actuation of the ring. (Right) Tip and tilt of the mirror by actuating both the mirror and the ring. (Image courtesy of Kuan-Fu Chen and Tung-Chien Chen, EE215 MEMS Design final project report, Spring 2007.) See color plate section.

K.-F. Chen, and T.-C. Chen, Optical Cross-connect Switch (OXC), EE215 MEMS Design, UC Santa Cruz, Spring 2007. 

A guide to hands-on MEMS design and prototyping / Joel Kubby. 

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