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MEMS based sensors

R D and testing of a hand-held miniaturized detection system based on multiple MEMS-based sensors for improved alarm verification (see discussions below on the Sandia National Eaboratory (SNE) pChemEab on a chip). [Pg.292]

The miero-hotplate gas sensor is a eonduetometrie MEMS-based sensor that uses the... [Pg.478]

MEMS-based sensors have low thermal inertia leading to higher dynamic response. [Pg.2963]

MEMS-based sensors are less intrusive compared to the traditional sensors due to their small size and therefore do not affect the flow significantly. [Pg.2963]

MEMS-based sensors are ideal for distributed measurements and control, as a large number of sensors can be fabricated on the same chip in a cost-effective manner. [Pg.2963]

Commercial thin-film batteries with a footprint of 3 cm will have a capacity of 0.4 mAh, which comes to 0.133 mAh/cm. Thin-film lithium-based microbatteries can be expected to meet the power requirements for the miniaturized power sources for MEMS-based sensors. [Pg.352]

See other pages where MEMS based sensors is mentioned: [Pg.198]    [Pg.225]    [Pg.524]    [Pg.2963]    [Pg.2963]    [Pg.2967]    [Pg.172]    [Pg.133]    [Pg.1817]    [Pg.1818]    [Pg.1821]    [Pg.352]    [Pg.470]    [Pg.470]    [Pg.476]   
See also in sourсe #XX -- [ Pg.17 , Pg.198 ]



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MEMS

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