Measurement science small dimensions

For both science and engineering applications, the AFM excels at measuring dimensions and dimensional changes at very small scales. In all of mineralogy and geochemistry, perhaps nowhere else is it more important to be able to observe dimensional change than for clay minerals. This section explores a new direction of research in this regard. 

X-ray photoelectron spectroscopy (XPS) was done on some of the silicon test samples and on all the sliders. The narrow dimensions of the air bearing surface of the slider are difficult to measure using ellipsometry, while the spot size of the XPS is small enough to measure in these regions. The XPS measurements were done on Surface Science Labs SSX-100 spectrometers (A1 source) at resolution 3 with a 300-pm spot size. These conditions yield an Ag M i2 line width of about 1.13 eV. The anode power was 50 W, and the irradiated area was about 300 x 500 pm because of the 35° angle of incidence. The XPS measurements were performed within 25 min to minimize film thickness erosion due to gradual ablation of the PFOM by the incident x-ray beam. 

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