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The following table lists examples of plasma CVD materials and their applications.P iP ] [Pg.142]

Material Deposited Common Precursors Deposition Temp. °C Applications Status [Pg.143]

Boro-phospho- SiH4-TEOS- 355 optical fiber decorative passivation semi- [Pg.143]

TiSi2 TiCl4-SiH4 380-450 IC s conductor in production semi- [Pg.143]

Diamond-like CH4-H2 300 cutting tools wear, erosion, semi- [Pg.143]

See other pages where Materials Deposited by Plasma CVD is mentioned: [Pg.142]

CVD