Material properties Young’s modulus

For Si cantilevers, the material properties (Young s modulus and Poisson s ratio) are known in any crystal orientation [7]. By contrast, the material properties of the SisN4 cantilevers are not well defined and may vary significantly [8] due to differences of the CVD processes [9, 10]. For instance, Young s moduli and Poisson s ratios of Si3N4 cantilevers in the range of 120—200 GPa and 0.22—0.27, respectively, have been reported. 

Material property Young s modulus, GPa Tensile strength, MPa Compressive strength, MPa Elongation, %... 

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