Low-temperature processed films

) It corresponds to a PZT perovskite thin film on a flexible polylmide substrate that was deposited from sol-gel precursors and crystallized at temperatures below 350 °C. 

This chapter shows the potential of sol-gel chemistry for the synthesis of solution precursors used in the CSD of thin films with electrical properties. CSD is an alternative low-cost deposition technique to the vacuiun and high-temperature deposition methods that, in addition, makes it possible to obtain stoichiometric and uniform thin films. Electrical properties of electroceramic thin films are extremely sensitive to processing, microstructure, heterostructure, crystallinity, or charged defects of the film. Sol-gel offers the chance of controlling these film characteristics and therefore the functional properties by tailoring the solution chemistry and the thermal conversion of the as-deposited gel layer into a ceramic film. 

1 Moulson, A.J. and Herbert, J.M. (2003) Electroceramics, 2nd edn, John Wiley Sons, Ltd, Chichester, UK. 

(1956) Aids in hydrothermal experimentation. 2. Methods of making mixtures for both dry and wet phase equilibrium studies. /. Am. Ceram. Soc  

5 Kamiya, K. (2004) Oxynitride glasses and nitrides, in Sol-Gel Science and Technology. Processing Characterizatum and Applications. Volume I Sol-Gel Processing (ed. S. Sakka), Kluwer Academic Publishers, Osaka, p. 171. 

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