Lithographically patterned nanowire

A related electrochemical approach to nanoelectrode fabrication was previously demonstrated by Peimer s group. In this case a nanotrench electrode was instead used as a template for the electrodeposition of metal nanowire electrodes in a method referred to as lithographically patterned nanowire electrodeposition (LPNE). Simple photolithography was used to define a sacrificial nickel or silver nanoband electrode sandwiched between... 

FIGURE 16.2 Process flow for lithographically patterned nanowire electrodeposition. (Reprinted by permission from Macmillan Publishers Ltd. Nature Materials, Menke, E.J., Thompson, M.A., Xiang, C., Yang, L.C., and Penner, R.M, Lithographically patterned nanowire electrodeposition, 5, 914-916, 2006. Copyright 2006.)... 

Hujdic, J. E., Saigisian, A. R, Shao, J. R., Ye, T., and Menke, E. J. 2011. High-density gold nanowire arrays by lithographically patterned nanowire electrodeposition. Nanoscale 3 2697-2699. 

In a method called lithographically patterned nanowire deposition (LPNE), developed by Penner and coworkers, a template for the growth of nanowires is temporarily fabricated on the surface of a dielectric using standard photolithographic methods.The nanowire is grown by... 

Xiang, C., S.-C. Kung, D. K. Taggart et al. 2008. Lithographically patterned nanowire electrodeposition A method for patterning electrically continuous metal nanowires on dielectrics. ACS Nano 2 1939-1949. 

C Yang, L.C. and Penner, R.M. (2006) Lithographically patterned nanowire electrodeposition. Nature Materials, 5, 914. 

Fig. 4.12 SEM image of gas sensors with metal nanowires, (a) Lithographically patterned Pd nanowire with t = 100 nm, w=300 nm, and /= 10 pm. Four Ti/Au inner electrodes were patterned on the Pd nanowire, (b) Pd nanowire grown by electrodeposition into nanochannels of AAO templates d=20 nm (Reprinted with permission from Jeon et al. 2008 and 2009, Copyright 2008 and 2009 lOP)...

Fig. 4.13 The real-time electrical responses at room temperature of Hj gas sensors based on Pd nanowires, (a) Grained structure of Pd nanowires (Reproduced with permission from Walter et ed. 2002a, Copyright 2002 Elsevier), (b) Lithographically patterned Pd nanowires with r=400 nm (Reprinted with permission from Jeon et al. 2009, Copyright 2009 lOP)...

SiNWs, fabricated through lithographic patterning or chemical synthesis, can be further reduced in diameter through a self-limiting oxidation process. For example, Liu et al. (1994) have shown that with an initial Si pillar diameter of 30 nm, 6-nm Si nanowires can be obtained using this approach. 

Muck, A., Stelzner, T., Huhner, U., Christiansen, S. and Svatos, A. (2010) Lithographically patterned sihcon nanowire arrays for matrix free LDI-TOF/MS analysis of lipids. Lab Chip 10, 320-325. 

Besides the aforementioned templates, many other research groups have developed their own template-based electrochemical synthesis techniques. For example, photolithography methods such as the lithographically patterned nanoscale electrodeposition (LPNE) method developed by Penner are excellent ways to produce nanostructures with controllable dimensions. - With this process, the Penner group has been able to produce nanowires with length scales in the macroscale while still maintaining precise control over the nanowires height and width with resolutions in the tens of nanometers." ... 

It is clear from the VLS nanowire growth mechanism that the positions of the nanowires can be controlled by the initial positions of the Au clusters or Au thin films. By creating desired patterns of Au using the lithographic technique it is possible to grow ZnO nanowires of the same designed pattern since they grow... 

For single-nanowire devices, highly expensive techniques (such as a focused ion beam, or a series of nano-lithographic tools) must be used, ranging from proton and electron beam nanoUthography, in which patterned substrates are obtained under the application of a charged particle beam, to nano-imprint lithography. ... 

Soft lithography includes a collection of lithographic methods in which a soft mold or template is used to create patterned structures in the subjeeted materials. These methods offer attractive solutions for producing well-ordered CP nanowires. For example, Beh et al have developed a micromolding in capillaries (MIMIC) process in which a poly(dimethylsiloxane) (PDMS) mold with embedded ehannels can be used for the... 

---