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Lithographically Induced Self-Assembly

S. Y. Chou, Nano-imprint lithography and lithographically induced self-assembly, MRS Bull 26 (2001) 512. [Pg.634]

Figure 14.9 Schematic view of the LISA process, (a) Thin layer of polymer spin-coated on a flat silicon wafer, (b] Mask of protruding patterns separated by the polymer film using a spacer, (c) During the heat cooling cycle the polymer film self-assembles into a periodic supramolecular pillar array. [Images taken from Ref. 67.) Abbreviation LISA, lithographically induced self-assembly. Figure 14.9 Schematic view of the LISA process, (a) Thin layer of polymer spin-coated on a flat silicon wafer, (b] Mask of protruding patterns separated by the polymer film using a spacer, (c) During the heat cooling cycle the polymer film self-assembles into a periodic supramolecular pillar array. [Images taken from Ref. 67.) Abbreviation LISA, lithographically induced self-assembly.
S. Y. Chou and L. Zhuang, Lithographically induced self-assembly of periodic polymer micropillar arrays,/ Vac. Sci. TechnoL, B, 17, 3197-3202 (1999). [Pg.572]

See other pages where Lithographically Induced Self-Assembly is mentioned: [Pg.542]    [Pg.542]    [Pg.193]    [Pg.145]    [Pg.92]    [Pg.164]    [Pg.140]    [Pg.151]    [Pg.545]    [Pg.781]    [Pg.422]    [Pg.28]   


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