Laser assisted vapour deposition

Other processes investigated for planar SOFC fabrication include electrostatic-assisted vapour deposition, vapour phase electrolytic deposition, vacuum evaporation, laser spraying, transfer printing, sedimentation method, and plasma metal organic chemical vapour deposition. [Pg.207]

Several attempts have been made to synthesize thin film C3N4, be it cubic or hexagonal. These include reactive magnetron sputtering [184-187], laser ablation [188] ion beam assisted deposition (IBAD) [189], plasma [191, 192] and plasma-enhanced chemical vapour deposition [190]. [Pg.523]

F. T. Wallenberger, Inorganic fibers and microfabricated parts by laser assisted chemical vapour deposition (LCVD) structures and properties, Cer. International, 23,119-126 (1997). [Pg.76]